| Product Name | BIS(CYCLOHEXYLSULFONYL)DIAZOMETHANE |
| CAS No. | 138529-81-4 |
| application | Non-ionic photoacid generator (PAG) for chemically amplified DUV photoresists (KrF 248 nm, ArF 193 nm); semiconductor/microelectronics microfabrication; photosensitive coatings and electronic packaging inks. |
| package | As required |
| Molecular Weight | 334.45 |
| Molecular Formula | C13H22N2O4S2 |
| Specification | 99% |
