| Product Name | TETRAMETHYLAMMONIUM SILICATE |
| CAS No. | 53116-81-7 |
| application | Semiconductor CMP slurries (corrosion inhibitor for Cu/Al interconnects); photoresist stripping and wafer cleaning; CVD/spin-on silica precursor (metal-free silicon source); zeolite LTA templating. |
| package | As required |
| Molecular Weight | 388.66 |
| Molecular Formula | C16H48N4O4Si |
| Specification | 99% |
